BEAMeeting at HHI in Berlin

Time:               January 30

.Place:            Fraunhofer Institut for Telecomunication HHI, Einsteinufer 37, D-10587 Berlin, Rooms23a ad 24a

The overall topics will range from:

  • PEC and Process Calibration and Correction
  • Exposure optimization (fracturing, field positioning/ordering, exposure order within the field)
  • Laser lithography (binary and grey tone)
  • SEM metrology Software using ProSEM
  • Users presentations